academic article

• In-Situ Experimental Results on the Sylilation of Low k Films with Hexamethyldisilazane Dissolved in Supercritical Carbon Dioxide.  Journal of Supercritical Fluids.  90:134-143. 2014
• Surface Modification of Porous Silicon-Based Films Using Dichlorosilanes Dissolved in Supercritical Carbon Dioxide.  Industrial & Engineering Chemical Research Journal.  52:4762-4771. 2013
• Surface Modification of Carbon- Doped SiO2 Films Using Chlorosilanes Dissolved in Supercritical Carbon Dioxide.  Industrial & Engineering Chemical Research Journal.  2012