selected publications
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academic article
- Chemically Bonded Porogens in Methylsilsesquioxane: I. Structure and Bonding. Journal of The Electrochemical Society. 149:F161-F170. 2002
- Chemically Bonded Porogens in Methylsilsesquioxane: II. Electrical, Optical and Mechanical Properties. Journal of The Electrochemical Society. 149:F171-F180. 2002
- Fabrication of Air-Channel Structures for Microfluidic, Microelectromechanical and Microelectronic Applications. Journal of Microelectromechanical Systems. 10:400-408. 2001
- Porous Methylsilsesquioxane for Low-k Dielectric Applications. Electrochemical and Solid-State Letters. 4:F25-F28. 2001
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patent