selected publications
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academic article
- In-Situ Experimental Results on the Sylilation of Low k Films with Hexamethyldisilazane Dissolved in Supercritical Carbon Dioxide. Journal of Supercritical Fluids. 90:134-143. 2014
- Surface Modification of Porous Silicon-Based Films Using Dichlorosilanes Dissolved in Supercritical Carbon Dioxide. Industrial & Engineering Chemical Research Journal. 52:4762-4771. 2013
- Surface Modification of Carbon- Doped SiO2 Films Using Chlorosilanes Dissolved in Supercritical Carbon Dioxide. Industrial & Engineering Chemical Research Journal. 2012
- High-Pressure Phase Equilibria for Chlorosilane + Carbon Dioxide Mixtures. Fluid Phase Equilibria. 270:121-128. 2008