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An Analytical Model For Conveyor-based Material Handling System with Crossovers in Semiconductor Wafer Fabs
Academic Article
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Additional Document Info
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Overview
authors
Nazzal, D.
Jimenez, J. A.
Carlo-Colon, Hector J.
Johnson, A. L.
Lasrado, V.
publication date
2010
published in
IEEE Transactions on Semiconductor Manufacturing
Additional Document Info
start page
468
end page
476
volume
23
issue
3